O'Reilly logo

Ultrasonic Transducers by K Nakamura

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

4

Thin-film PZT-based transducers

M.K. Kurosawa,     Tokyo Institute of Technology, Japan

Abstract:

The miniaturization of ultrasonic actuators and sensors uses a deposition process for the fabrication of the piezoelectric film. The hydrothermal deposition process is suitable for the fabrication of these devices: it involves low reaction temperatures, is carried out in solution, selfpolarization occurs and no annealing is required. Devices fabricated using hydrothermal PZT film deposition have high-intensity vibration capabilities, which is beneficial for actuator applications. The fabrication and analysis of an ultrasonic micro-motor, a touch-probe sensor and an ultrasonic micro-scalpel that operate using the transverse-mode d31 effect are ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required