Micromachined semiconductor gas sensors
D. Briand, Ecole Polytechnique Fédérale de Lausanne, Switzerland
J. Courbat, Innovative SensorTechnology IST AG, Switzerland
Abstract:
This chapter reviews micromachined semiconductor gas sensors. First, the chapter briefly discusses the history of this technology. It then addresses the micro-hotplates concept that has led to the development of different types of micromachined gas sensor devices. The different realizations of micromachined semiconductor gas sensors are presented: thin- and thick-film metal-oxide, field effect, and those using complementary metal-oxide semiconductors (CMOSs) and silicon-on-insulator (SOI) technologies. Finally, recent developments based on gas sensitive nanostructures, ...
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