Reliability of silicon integrated circuits
A.S. Oates Taiwan Semiconductor Manufacturing Company Ltd, Hsinchu, Taiwan
Abstract
Reliability assurance of silicon integrated circuits (ICs) has been an essential activity since the earliest days of the IC industry. Cross-disciplinary investigations of failure mechanisms have resulted in a comprehensive understanding of the degradation phenomena that dominate silicon circuit reliability. Reliability is now considered from the very earliest stages of development of silicon manufacturing technologies and is a primary driver of decisions taken in the design of a manufacturing process technology. Studies of reliability will continue to play an important role in the development of the Si industry: the ...
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