Chapter 6

Electronic Charge-Induced Damage

Abstract

To the extent that the degradation and failure effects are the consequence of matter transport, this time of electrons and holes, we may view this chapter as a companion to the previous one. Whereas metal–metal, metal–semiconductor, and electron–metal interactions were largely the focus of Chapter 5, here our interest is primarily in insulators and the corresponding electron (hole)–electron or electron–atom interactions. The physical laws that govern the motion of neutral atoms and electronic carriers differ, and the damage wreaked by their motion also differs markedly. Insulators, and to a lesser extent semiconductors, rather than conductors, are the primary victims of electric field-induced accumulation ...

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