INDEX
Acceleration
Accelerometer
closed-loop
force-balanced
open-loop
electrostatic
electrostatic parallel-plate
force-balanced electrostatic
symmetric
Acoustic wave
Active element
Alignment mark
Ammonia
Ampere’s law
Analogy
between macro- and micro-fabrications
between potential energies
between thermal and electric problems
Angular displacement
of composite cantilever beams
of torsional actuator
Angular gradient operator
Approximation of gap-closing actuators
Argon
Armature
Arsine
Ashing
Bandwidth
of low-pass filter
Beam equation
including geometric nonlinearity
Bending modulus
Biharmonic operator
Bimetallic actuator
with varying temperature
bioMEMS
Boltzmann’s constant
Breakdown
electric
Buckingham’s π-theorem
Buckling
Buckling mode
of fixed-fixed beams
Bulk micromachining
C4F8
Cantilever
Cantilever beam
Cantilever beam actuator
Capacitance
of cantilever beam actuator
of fixed-fixed beam actuator
of parallel plate actuators
of parallel plates
Capacitor
Cardano’s formula
Castigliano’s theorem
Centrifugal force
Characteristic length
Characteristics of cubic force
Charge
Chemical vapor deposition.
Closed-form solution
Coefficient of thermal expansion
Co-energy
Comb drive
Comb drive actuator
Complementary energy
for magnetic field
stored in a capacitor
Complementary error function
Compliance
of a folded beam, in-plane motion
of a folded beam, out-of-plane motion
of a L-shaped beam, in-plane motion
of a L-shaped beam, out-of-plane motion
of a straight beam, in-plane motion
of a straight beam, out-of-plane motion
Compliance transformation
Composite beam
Conduction ...
