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Plasma Engineering by Isak Beilis, Michael Keidar

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Chapter 6

Plasma Nanoscience and Nanotechnology

6.1 Plasmas for nanotechnology

6.1.1 Definitions

Nanoscience is defined as a research field that encompasses objects having dimensions smaller than 100 nanometers. Nanoscience addresses basic organization principles of the nanoscopic objects and describes their unique properties. Objects at this scale exhibit very different properties and physics than that of the bulk objects of the same material. At this scale, quantum mechanic effects become very important. Nanotechnology deals with synthesis of nanoscopic objects and devices as well as various applications. Nanoscopic objects could be formed from the precursors in various states (atoms, molecules, clusters, exited states, etc.). Plasma nanoscience ...

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