Nanotechnology: Science, Innovation, and Opportunity

Appendix . Acronyms and Abbreviations

AFM	atomic force microscopy
AI	artificial intelligence
ANSI	American National Standards Institute
CMOS	complementary metal oxide semiconductor
CMP	chemical mechanical planarization or chemical mechanical polishing
CNTs	carbon nanotubes
CPSC	Consumer Products Safety Commission
CRADA	Cooperative Research and Development Agreement
CVD	chemical vapor deposition
DoD	Department of Defense
DOE	Department of Energy
DPN	dip-pen nanolithography
DRAM	dynamic random access memory
IBEA	Institute for Biological Energy Alternatives
IDD	implantable drug delivery
LEDs	light-emitting diodes
MEMS	microelectromechanical systems
MMS	molecular microswitch
MOSFET	metal oxide semiconductor field effect transistor
MRI	magnetic resonance imaging
MURI	Multi-University Research ...