Nano Lithography

First published 2011 in Great Britain and the United States by ISTE Ltd and John Wiley & Sons, Inc. Adapted and updated from La nanolithographie published 2010 in France by Hermes Science/Lavoisier © LAVOISIER 2010

Apart from any fair dealing for the purposes of research or private study, or criticism or review, as permitted under the Copyright, Designs and Patents Act 1988, this publication may only be reproduced, stored or transmitted, in any form or by any means, with the prior permission in writing of the publishers, or in the case of reprographic reproduction in accordance with the terms and licenses issued by the CLA. Enquiries concerning reproduction outside these terms should be sent to the publishers at the undermentioned address:

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The rights of Stefan Landis to be identified as the author of this work have been asserted by him in accordance with the Copyright, Designs and Patents Act 1988.

Library of Congress Cataloging-in-Publication Data

Nanolithography English    Nano-lithography / edited by Stefan Landis.       p. cm.    Includes bibliographical references and index.   ISBN 978-1-84821-211-4    1. Microlithography. 2. Nanotechnology. I. Landis, Stefan. II. Title.    TK7872.M3N3613 2011    621.3815'31--dc22

2010046516

British Library Cataloguing-in-Publication DataA CIP record for this book is available ...