Chapter 13 Deep X-Ray Lithography
Introduction
By far the leading technology for the manufacturing of MEMS devices is silicon micro-machining with its various derivatives. However, many applications of micro-systems have requirements in respect of materials, geometry, aspect ratio, dimensions, shape, accuracy of micro-structures, and number of parts that cannot be fulfilled easily by mainstream silicon-based micro-machining technologies. LIGA, a German acronym for Lithography (Lithographie), Electroplating (Galvanoformung), and Molding (Abformung) enables the highly precise manufacture of high aspect ratio micro-structures with large structural thickness ranging from hundreds to thousands of microns. ...
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