Machining with Electrochemical Discharges—An Overview
Abstract
The last century also saw the birth of micromachining, in particular micromachining of silicon. A huge variety of micromachining techniques are available for silicon. A similar situation exists for electrically conductive materials, where, in particular, electrochemical machining (ECM) and electrical discharge machining (EDM) are two powerful tools available. However, several electrically nonconductive materials are also of great interest for many applications. Glass and composite materials are two examples. The technical requirements for using glass in microsystems are growing. Medical devices requiring biocompatible materials is only one of many examples.
Various techniques ...
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