Bibliography

Chapter 1: Introduction

[1] Petersen K.E., Shartel A., Raley N.F. Micromechanical accelerometer integrated with MOS detection circuitry. IEEE Transactions on Electron Devices. 1982;29(1):23–27 (cit. on p. 3).

[2] Chen P.L., Muller R.S., Andrews A.P. Integrated silicon PI-FET accelerometer with proof mass. Sensors and Actuators. 1984;5(2):119–126 (cit. on p. 3).

[3] Gravesen P., Branebjerg J., Jensen O.S. Microfluidics: A review. J. Mioromech. Microeng. 1993;3: (cit. on p. 4).

[4] Bassous E., Taub H.H., Kuhn L. Inkjet printing nozzle arrays etched in silicon. Applied Physics Letters. 1977;31(2):135–137 (cit. on p. 4).

[5] Tuckerman D.B., Pease R.F.W. High-Performance Heat Sinking for VLSI. IEEE Electron Device Letters. 1981;5: (cit. ...

Get Microfluidics: Modeling, Mechanics and Mathematics now with the O’Reilly learning platform.

O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.