Microfabrication for Industrial Applications

Preface

Small, smaller, nano: “What happened?”. Posing this question insinuates that “micro” has not made its way into the popular scenarios of opinion makers. Micro has had tremendous success in the microelectronics industry, but all other fields lack attention. It is not my current intention to evaluate why micro lacks impact on society and nano is overrated, but to provide a book on Microfabrication for Industrial Applications. This is because of two reasons: (1) I have spent the last twenty years in this field of research and I am fascinated by the fact that not only can we fabricate a hole of 10 μm diameter, but also we can make it at a precision of 10 ± 0.05 μm under mass production conditions, and, (2) I am not only a scientist in this ...