Index
A
AAO nanoimprinting, 111
ablation techniques, 42–4
accelerometers, 157
active microvalves, 207–10
additive processing, 74–5
advanced microfabrication methods, 55–89
LIGA concepts, 57–8
micro-ceramic processing, 59–70
non-silicon hybrid devices, 71–4
planar lightwave circuits, 74–80
reactive ion etching, 59
silicon hybrid devices, 71–4
speciality substrates, 71
Advanced Silicon Etching (ASE), 59
agriculture, 182
ALD see atomic layer deposition
aluminium etch, 22
aluminium support frames, 162–3
amorphous materials:
micromechanical transducers, 154
photostructurable glass, ...
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