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Microfabrication for Industrial Applications

Book Description

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.

• Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments
• Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro
• Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs)
• Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT)
• Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Table of Contents

  1. Cover image
  2. Title page
  3. Table of Contents
  4. Micro & Nano Technologies Series
  5. Copyright
  6. Preface
  7. Author Biography
  8. Chapter 1. Introduction
    1. 1.1 Philosophy of Micro/Nanofabrication
    2. 1.2 The Industry–Science Dualism
    3. 1.3 Industrial Applications
    4. 1.4 Purpose and Organization of this Book
    5. REFERENCES
  9. Chapter 2. Basic Technologies for Microsystems
    1. 2.1 Photolithography
    2. 2.2 Thin Films
    3. 2.3 Silicon Micromachining
    4. 2.4 Industrially Established Non-Silicon Processing
    5. 2.5 Conclusions
    6. REFERENCES
  10. Chapter 3. Advanced Microfabrication Methods
    1. 3.1 LIGA
    2. 3.2 Deep Reactive Ion Etching
    3. 3.3 Micro-Ceramic Processing
    4. 3.4 Speciality Substrates
    5. 3.5 Advanced Non-Silicon and Silicon Hybrid Devices
    6. 3.6 Planar Lightwave Circuits
    7. 3.7 Fabrication Example of an Integrated Optical Device
    8. 3.8 Integrated Optics in the MST Foundry Service Industry: A Case Study
    9. 3.9 Conclusions
    10. REFERENCES
  11. Chapter 4. Nanotechnology
    1. 4.1 Top-Down, Bottom-Up
    2. 4.2 Nanomaterials
    3. 4.3 Where Are We?
    4. 4.4 Where to Go from Here?
    5. REFERENCES
  12. Chapter 5. Micromechanical Transducers
    1. 5.1 Application Fields
    2. 5.2 Overview of Materials
    3. 5.3 Thick and Thin Film Hybrid Materials
    4. 5.4 Microactuation
    5. 5.5 Packaged Sensors
    6. 5.6 Silicon as a Mechanical Material in Resonant Microdevices
    7. 5.7 Information Society
    8. 5.8 Conclusions
    9. REFERENCES
  13. Chapter 6. Chemical and Biological Sensors at Component and Device Level
    1. 6.1 Application Field
    2. 6.2 Sensor Principles for the Collection of (Bio)Chemical Information
    3. 6.3 Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development
    4. 6.4 Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays
    5. 6.5 Conclusions
    6. REFERENCES
  14. Chapter 7. Microfluidic Components, Devices and Integrated Lab-on-a-Chip Systems
    1. 7.1 Application Fields
    2. 7.2 Microfluidic Components
    3. 7.3 Controlled Transport by Diffusion
    4. 7.4 Integration for Microfluidic Transport, Sensing and Dispensing
    5. 7.5 Lab-on-a-Chip
    6. 7.6 Device-to-World Connections: The MATAS Concept
    7. 7.7 From the Lab Bench to Industry: Microchip Capillary Electrophoresis
    8. 7.8 Conclusions
    9. REFERENCES
  15. Chapter 8. Microfabrication for Novel Products in Drug Delivery: An Example
    1. 8.1 Microneedle Research at University of Twente and its Spin-Off
    2. 8.2 MNA-4-Insulin: A Brief Evaluation
    3. 8.3 Conclusions
    4. REFERENCES
  16. Chapter 9. Reflective Comments and Conclusions
    1. 9.1 Environmental Aspects
    2. 9.2 Health Aspects of Nanoparticles
    3. 9.3 Conclusions
    4. REFERENCES
  17. Index