Acknowledgments

I would like to pay tribute to John Vossen’s memory for the advice and steadfast encouragement he provided during the writing of the first edition of this book. His influence extended to this edition as well as through the generous gift of much of his personal library on thin film science and technology to me by his widow Joan. These books, together with the John Vossen Laboratory for Vacuum and Thin Film Technology, established at Stevens Institute by the BOC Corp. and Dr. Abe Belkind, its director, have helped to considerably enhance my awareness and knowledge of plasma processing of thin films. In this regard I am particularly grateful to Abe for carefully reviewing the chapters devoted to physical vapor deposition. However, ...

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