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Introduction to Nanoelectronics by Michael A. Stroscio, Viatcheslav A. Kochelap, Vladimir V. Mitin

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5  Growth, fabrication, and measurement techniques for nanostructures

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5.1  Introduction

Having reviewed the basic properties of materials exploited in nanoelectronics, we shall now study the principal methods of high-quality material growth and nanodevice fabrication. Methods for the growth of perfect materials with controllable properties are critically important for nanostructure fabrication. Indeed, stringent requirements must be met for the growth of crystals for nanosize devices. These requirements include many factors and, first of all, ultra-high quality and purity, both controlled within extremely close limits. The following examples illustrate ...

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