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In Situ Characterization of Thin Film Growth by G Rijnders, G Koster

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9

Real-time studies of epitaxial film growth using surface X-ray diffraction (SXRD)

G. Eres, J.Z. Tischler, C.M. Rouleau, B.C. Larson and H.M. Christen,     Oak Ridge National laboratory, USA

P. Zschack,     Argonne National Laboratory, USA

Abstract:

We review recent results in the study of pulsed laser deposition growth kinetics using real-time surface X-ray diffraction. interlayer transport as the primary driving force behind formation of atomically sharp layers is analyzed quantitatively from the measurements of time constants and shot-to-shot changes in single laser shot time dependent coverages in the growth of the model perovskite srTiO3. The results show that direct deposition into the open layers and very fast interlayer transport ...

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