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In Situ Characterization of Thin Film Growth by G Rijnders, G Koster

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1

Reflection high-energy electron diffraction (RHEED) for in situ characterization of thin film growth

G. Koster,     University of Twente, the Netherlands

Abstract:

In this chapter reflection high-energy electron diffraction (RHEED) is described in combination with pulsed laser deposition (PLD). Both the use of RHEED as a real-time rate-monitoring technique as well as methods to study the nucleation and growth during PLD are discussed. After a brief introduction of RHEED and demonstration of typical surface diffraction patterns, a case will be made for the step-density model to describe the intensity variations encountered during deposition. Finally, an overview of these intensity variations, the intensity response during a RHEED experiment ...

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