Applications of terahertz technology in the semiconductor industry
Y. Cai, Z. Wang and D. Goyal, Intel Corporation, USA
Abstract:
Electro-optical terahertz pulse reflectometry (EOTPR), an electro-optical system driven by an ultrafast laser source, has enabled terahertz to be successfully applied in fault isolation and defect detection for microelectronics. This system has 10 μm resolution with high speed test signal, high bandwidth measurement of the system’s response and low time base jitter. Numerous successful failure analysis cases have demonstrated the unique capabilities of EOTPR and its advantages over conventional time domain reflectometry.
Key words
electro-optics
photoconductive switch,
rise time,
resolution,
signal/noise ...
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