Handbook of Silicon Based MEMS Materials and Technologies

Appendix 1. Common Abbreviations and Acronyms

AASAtomic Absorption Spectroscopy, a technique to analyze impurities AFMAtomic Force Microscope, used in wafer surface nanotopography characterization ALDAtomic Layer Deposition ANSIAmerican National Standards Institute AOGAxial Oxygen Gradient, oxygen distribution in crystal along the axis APCVDAtmospheric Pressure CVD ASICApplication-Specific Integrated Circuit ASTMAmerican Society for Testing and Materials, developed standards formerly to silicon technology, SEMI has taken that role now BCBBenzocyclobutene, known also under the commercial name Cyclotene® BDDBulk Defect Density BESOIBonded and Etchback SOI BGABall Grid Array BMDBulk Micro Defect, typically silicon dioxide precipitate, stacking fault ...