Chapter Twenty Nine. Silicon Based BioMEMS - Micromachining Technologies
29.1. Introduction to Silicon Based BioMEMS Devices
BioMEMS, or Bio-Micro-Electro-Mechanical Systems, integrates microsystems technology with applications in biology and the life sciences. As a truly interdisciplinary field, bioMEMS brings together various engineering disciplines, chemistry, medicine and biology [1, 2]. One of the common themes among these biological applications is that they deal with liquids [3]. Combined with microfluidics, bioMEMS devices provide a necessary platform for high-throughput analysis of complex biological systems. These studies can lead to a better understanding of the molecular basis of diseases, which could enable earlier disease detection. ...
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