Chapter Nine. Multiscale Modeling Methods
9.1. Macroscopic and Microscopic Equations
In order to analyze the characteristics of MEMS devices, it is usually good enough to use macroscopic or classical equations.
For example, mechanical and electromagnetic properties can be respectively described by the Navier’s equation(9.1)
and the Maxwell’s equations(9.2)
(9.3)
(9.4)and(9.5)
Here, in the Navier’s equation u is the displacement vector, ∇ (∂/∂r in the ...
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