Handbook of Silicon Based MEMS Materials and Technologies

2.2. Stages of Growth Process

The first step of a growth run is to charge the silicon into the crucible. Silicon is normally stored in clean double bags, about 5 kg in a bag, though larger containers may also be used. Double bags also make it possible to remove the outer bag separately before bringing the bags into the charging area, to reduce any contamination that could be transported into the crucible. The crucible may be charged as it already sits inside the grower. In order to save time at the grower and also to avoid contamination, the charge may be prepared in a separate area, after which the full crucible, with or without the graphite susceptor, is transported to the grower and lifted into place. Handling of a full crucible is challenging, ...