2.1. The CZ Crystal-Growing Furnace
The CZ furnace is a vacuum furnace that consists of the following subassemblies: crucible lifting and rotating system, growth chamber that houses the hot zone (HZ), vacuum interlock, receiving chamber for the grown crystal, and crystal rotating and lifting system. For more details, see Ref. [9], Figure 81 a and b. Modern CZ systems are able to grow crystals up to 450 mm in diameter, with charge sizes close to 500 kg. In MEMS applications, however, the maximum size of the crystal is 200 mm in diameter, and charge size may exceed 100 kg.
2.1.1. Crucible
An essential part of CZ growth is that the single semiconductor crystal is pulled out of melt that is contained in a refractory crucible. No solvent is used; ...
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