Front-matter

Handbook of Silicon Based MEMS Materials and Technologies

Micro & Nano Technologies

Series Editor: Jeremy Ramsden Professor of Nanotechnology, Microsystems and Nanotechnology Centre, Department of Materials, Cranfi eld University, United Kingdom

The aim of this book series is to disseminate the latest developments in small scale technologies with a particular emphasis on accessible and practical content. These books will appeal to engineers from industry, academic and government sectors.

 
9780815515944 Veikko Lindroos, Markku Tilli, Ari Lehto and Teruaki Motooka, Handbook of Silicon Based MEMS Materials and Technologies (2010)
9780815515838 Waqar Ahmed and M.J. Jackson, Emerging Nanotechnologies for Manufacturing (2009)
9780080964546 ...

Get Handbook of Silicon Based MEMS Materials and Technologies now with the O’Reilly learning platform.

O’Reilly members experience books, live events, courses curated by job role, and more from O’Reilly and nearly 200 top publishers.