RF MEMS fabrication technologies
K. Grenier and D. Dubuc, LAAS-CNRS, University of Toulouse, France
Abstract:
This chapter presents the developments enabled in wireless applications by microelectromechanical systems technologies. Based on surface and bulk micromachining techniques, the elaboration of passive components with improved performance in terms of losses and quality factor, as well as radio frequency (RF) tuneable and mechanical devices, is possible. Highlights of specific key steps in their fabrication are presented and discussed. Their implementation in complete microsystem integration is then considered. Finally, fabrication trends with new material combinations, such as carbon nanotubes, or openings to other disciplinary ...
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