You are previewing Handbook of Mems for Wireless and Mobile Applications.
O'Reilly logo
Handbook of Mems for Wireless and Mobile Applications

Book Description

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.

Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.

With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems.

  • Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications
  • Discusses wireless techniques and applications of wireless MEMS, including biomedical applications
  • Describes monitoring structures and the environment with wireless MEMS

Table of Contents

  1. Cover image
  2. Title page
  3. Table of Contents
  4. Copyright
  5. Contributor contact details
  6. Woodhead Publishing Series in Electronic and Optical Materials
  7. Dedication
  8. Preface
  9. Part I: RF MEMS as an enabling technology for wireless applications
    1. Chapter 1: Overview of RF MEMS technology and applications
      1. Abstract:
      2. 1.1 Introduction
      3. 1.2 Radio frequency microelectromechanical systems (RF MEMS) operation principle and common realizations
      4. 1.3 RF MEMS design challenges
      5. 1.4 RF MEMS applications
      6. 1.5 Conclusion
      7. 1.6 Sources of further information and advice
      8. 1.7 Acknowledgements
    2. Chapter 2: Overview of wireless techniques for use with MEMS
      1. Abstract:
      2. 2.1 Introduction
      3. 2.2 Transport layer issues
      4. 2.3 Network layer mobility issues
      5. 2.4 Data-link layer
      6. 2.5 Physical layer
      7. 2.6 The wireless link budget
      8. 2.7 Physical layer system design
      9. 2.8 Conclusion
    3. Chapter 3: RF MEMS fabrication technologies
      1. Abstract:
      2. 3.1 Introduction
      3. 3.2 MEMS-based technologies for RF circuits with enhanced quality factor and minimized losses
      4. 3.3 Technologies for smart RF MEMS
      5. 3.4 Highlights on specific key steps in RF MEMS fabrication
      6. 3.5 Towards integrated technology for microsystem implementation
      7. 3.6 Emerging technologies in wireless applications
      8. 3.7 Conclusion
      9. 3.8 Acknowledgements
    4. Chapter 4: RF MEMS passive components for wireless applications
      1. Abstract:
      2. 4.1 Introduction
      3. 4.2 RF MEMS passive components and their applications
      4. 4.3 High-performance passive components enabled by RF MEMS technology
      5. 4.4 Complex networks based on RF MEMS passive components
      6. 4.5 Conclusion
    5. Chapter 5: RF MEMS phase shifters for wireless applications
      1. Abstract:
      2. 5.1 Introduction
      3. 5.2 Switched-line phase shifter
      4. 5.3 Loaded-line phase shifter
      5. 5.4 Reflection-type phase shifter
      6. 5.5 Distributed-line phase shifter
      7. 5.6 Mixed-architectures and exotic phase shifters
      8. 5.7 Towards global manufacturing
      9. 5.8 Applications
      10. 5.9 Conclusion
    6. Chapter 6: RF MEMS antennas for wireless applications
      1. Abstract:
      2. 6.1 Introduction
      3. 6.2 RF MEMS antennas
      4. 6.3 Reconfigurable feeding networks
      5. 6.4 Reconfigurable antennas
      6. 6.5 Design considerations
      7. 6.6 Conclusion and future trends
      8. 6.7 Sources of further information and advice
    7. Chapter 7: RF MEMS-based wireless architectures and front-ends
      1. Abstract:
      2. 7.1 Introduction
      3. 7.2 Communication standards
      4. 7.3 Receivers, transmitters and transceivers: basic architectures
      5. 7.4 Conventional component technology
      6. 7.5 MEMS-based technology: filters, duplexers, switches, tunable devices and architecture
      7. 7.6 Diversity in receivers and transmitters
      8. 7.7 Multi-input multi-output (MIMO) systems
      9. 7.8 Systems-on-a-chip
      10. 7.9 Conclusion
    8. Chapter 8: RF MEMS technology for next-generation wireless communications
      1. Abstract:
      2. 8.1 Introduction
      3. 8.2 RF MEMS technology
      4. 8.3 RF MEMS technology for high-performance passive components
      5. 8.4 Technology platform for the fabrication of RF MEMS complex circuits
      6. 8.5 Some examples of high-performance devices enabled by the RF MEMS technology
      7. 8.6 Conclusion
    9. Chapter 9: Wafer-level packaging technology for RF MEMS
      1. Abstract:
      2. 9.1 Introduction
      3. 9.2 Wafer -level zero-level packaging for RF MEMSSS
      4. 9.3 Electrical effects of the packaging material on the packaged devices
      5. 9.4 Packaging with hard cap materials
      6. 9.5 Packaging with a polymer cap
      7. 9.6 Conclusion
    10. Chapter 10: Reliability of RF MEMS
      1. Abstract:
      2. 10.1 Introduction
      3. 10.2 Overview of failure mechanisms in RF MEMS
      4. 10.3 Charging in RF MEMS
      5. 10.4 Analytical modelling
      6. 10.5 Electrostatic discharge
      7. 10.6 Reliability issues of MEMS packages
      8. 10.7 Conclusion
  10. Part II: Wireless techniques and applications of wireless MEMS
    1. Chapter 11: Energy harvesters for powering wireless systems
      1. Abstract:
      2. 11.1 Introduction
      3. 11.2 Kinetic energy harvesters
      4. 11.3 Design of kinetic energy harvesters
      5. 11.4 Other typologies of energy harvesters
      6. 11.5 Conclusion
      7. 11.6 References
      8. 11.7 Appendix: list of symbols
    2. Chapter 12: MEMS wireless implantable systems: historical review and perspectives
      1. Abstract:
      2. 12.1 Introduction
      3. 12.2 Basic considerations and characteristics of wireless MEMS implantable systems
      4. 12.3 Significant research on radio frequency implantable systems from 1955 to 1975
      5. 12.4 Progress of implantable systems from 1980 to 2010
      6. 12.5 Challenges of implantable/attached electronics
      7. 12.6 Conclusion and future trends
      8. 12.7 Acknowledgements
    3. Chapter 13: Wireless considerations in ocular implants based on microsystems
      1. Abstract:
      2. 13.1 Introduction
      3. 13.2 Challenges of wireless ocular implants
      4. 13.3 Considerations of ocular microsystems
      5. 13.4 Applications of wireless microsystems in ocular implants
      6. 13.5 Necessary improvements in wireless ocular implants
      7. 13.6 Conclusion
    4. Chapter 14: MEMS-based wireless intraocular pressure sensors
      1. Abstract:
      2. 14.1 Introduction
      3. 14.2 Passive miniature implants for intraocular pressure (IOP) sensing
      4. 14.3 Introduction of active MEMS systems for IOP implants
      5. 14.4 Flexible parylene platforms for long-term MEMS implants
      6. 14.5 Design of custom ultra-low-power autonomous IOP sensors
      7. 14.6 Active and passive MEMS contact lenses for IOP monitoring
      8. 14.7 Conclusion
    5. Chapter 15: Drug delivery using wireless MEMS
      1. Abstract:
      2. 15.1 Introduction
      3. 15.2 Wireless power and data for drug delivery applications
      4. 15.3 A MEMS approach to drug delivery
      5. 15.4 Biological constraints and requirements
      6. 15.5 Security concerns for wireless implants
      7. 15.6 Wireless inductive powering and uni-directional data system for a MEMS drug pump
      8. 15.7 Suggested improvements and future generation device
      9. 15.8 Conclusion
      10. 15.9 Acknowledgment
    6. Chapter 16: RF MEMS for automotive radar
      1. Abstract:
      2. 16.1 Introduction
      3. 16.2 RF MEMS components for automotive radar
      4. 16.3 Examples of RF MEMS-based automotive radar front-end technology
      5. 16.4 Unconventional MEMS radar beam-steering technologies
      6. 16.5 Conclusion
    7. Chapter 17: Telecommunications reliability monitoring using wireless MEMS
      1. Abstract:
      2. 17.1 Introduction
      3. 17.2 Typical reliability issues in telecommunication systems
      4. 17.3 Reliability monitoring with wireless MEMS
      5. 17.4 Case study: multi-MEMS platform
      6. 17.5 Conclusion
      7. 17.6 Acknowledgements
    8. Chapter 18: Optical MEMS for displays in portable systems
      1. Abstract:
      2. 18.1 Introduction
      3. 18.2 MEMS-based direct-view displays
      4. 18.3 Handheld picoprojectors
      5. 18.4 Automobile head-up display
      6. 18.5 Eyewear displays
      7. 18.6 Conclusion
  11. Index