Introduction
Semiconductor manufacturing continuously faces the most demanding technical challenges of any industry. As features have scaled, one of the most problematic areas of fabrication has been cleaning. Over the last few decades, the art of cleaning has turned into the science of surface preparation, critical cleaning, post-etch residue removal, and particle removal. Years ago the integrated circuit industry “borrowed” techniques from other industries – now the microelectronic engineers and scientists are the technology drivers. They work with the most advanced technology in the world making affordable microprocessors, controllers, and memory devices, so everyone can afford the newest electronic gadgets. These engineers work on devices that have minute features, rare materials, intricate equipment, and specialized processes. They help develop high-yielding, easily manufactured processes for the most sophisticated devices at the minimal cost and with the lowest environmental impact. This handbook celebrates these individuals – those who develop processes that are not physically present on a finished device. The chemicals used are all washed away, along with the contaminating metals, organics, and particles, yielding a pristine surface.
We have assembled authors with specific expertise to provide a thorough and thoughtful look at key range of cleaning topics in this field. The work is divided into three sections. The first six chapters address fundamental processes in chemical ...
