O'Reilly logo

Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications by Richard F. Reidy, Karen A. Reinhardt

Stay ahead with the world's most comprehensive technology and business learning platform.

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, tutorials, and more.

Start Free Trial

No credit card required

Chapter 8

High Dose Implant Stripping

Karen A. Reinhardt1 and Michael B. Korzenski2

1Cameo Consulting, San Jose, California, USA

2ATMI, Advanced Technology Development, Danbury, Connecticut, USA

Abstract

Specialized processes have been developed for high dose implant stripping (HDIS) because of the difficulty in removing the highly cross-linked and carbonized photoresist crust. Traditional plasma followed by wet processing has limitation due to the silicon loss, and all-wet processing has limitations due to the implant dose and energy creating a damaged crust layer that cannot easily be removed with standard processing chemicals. This chapter discusses the definition of high-dose implant, the formation of the crust, the methods to remove the crust and the bulk photoresist, the limitations of the processes plus newly developed methods to address these limitations.

Keywords: high-dose implant stripping, photoresist stripping, sulfuric acid hydrogen peroxide mixture, hydrogen plasma, photoresist crust, silicon loss, junction loss

8.1 Introduction and Overview of High Dose Implant Stripping

Post-ion implant photoresist is challenging to completely remove due to the high doses of the ions that are implanted into the photoresist because the photoresist is cross-linked and dehydrated during the process. Plasma stripping followed by a wet cleaning process, typically SPM (sulfuric acid hydrogen peroxide mixture) sometimes followed by SC-1 (standard clean-1), is the process of record at ...

With Safari, you learn the way you learn best. Get unlimited access to videos, live online training, learning paths, books, interactive tutorials, and more.

Start Free Trial

No credit card required