Filtering, Recirculating, Reuse, and Recycling of Chemicals
Filtration is a key aspect of contamination control for the manufacturing of integrated circuits. Particulate contaminants can be found in cleaning chemistries – both in bulk distribution as well as in the tools. Particles are also generated from etching and cleaning processes within the tools. Proper choice of filtration materials and design is complex and dependent on the application and tool design with careful consideration of the process. For example, filters can be optimized for single pass or recirculation efficiencies, intended for single wafer spray tools or chemical recirculation batch immersion tools, respectively. Particle metrology is integral to confirmation of particle control, and in combination with proper filtration, will provide high confidence in minimization of particle related contamination. Utilization of chemical management and chemical reuse will reduce the chemicals cost in the fab.
Keywords: filters, filtration, contamination control, point-of-use, recirculation, chemical recycling, chemical reuse, chemical distribution, chemical management, particle counters, bulk chemical delivery, filtration mechanisms, ...