Ferroelectric Dielectrics Integrated on Silicon

Preface

 

 

 

The idea of this book germinated in 2008 following a discussion with Michel Bruel about the work on materials of the perovskite family carried out at CEA LETI Minatec in Grenoble. It quickly came to our mind to bring together in one document the studies that we have undertaken in this area since the early 2000s. Thus several people have come to lend a hand in the writing of this book by taking charge of a section or a chapter corresponding to their area of expertise. Twenty-one people have contributed to this project, which was eventually split into two volumes: the first, Piezoelectric Materials Integrated on Silicon, published by ISTE in 2011 and dedicated to the study of thin piezoelectric films and the second volume on dielectrics with very high permittivity and ferroelectrics.

In this book, following the same vein as the piezoelectricity book, I wanted to repeat the basic thermodynamic concepts in order to lay down a solid foundation. However, it will be noted that this book is much more focused on technological aspects with nine chapters on this thematic out of twelve in total. Chapter 1 is dedicated to the general theory of thermodynamics, which works very well to explain most of the properties of these materials. Chapter 2 deals with the specific property of thin films on a substrate and the radical change that it induces on the mathematical formulation of this subject. Chapter 3 covers the techniques of deposition and shaping of these specific dielectric ...