Mid-IR Spectroscopy as a Tool for Cleanliness Validation
Mary A. Thomson Remspec Corporation, Sturbridge, Massachusetts, USA
Abstract
Mid-infrared spectroscopy performed in the reflectance mode provides a convenient tool for surface analysis and cleanliness validation. The method can be used to identify and measure organic contaminants down to submicrogram levels and provide a direct, near real-time result without the need for subsequent laboratory analysis. The method is described in detail, and a number of laboratory-based examples and field studies are discussed.
Keywords
Mid-infrared
Spectroscopy
Infrared reflection-absorption spectroscopy
Cleanliness validation
Contamination
Grazing angle
Direct reflectance
Fourier transform infrared
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