UV-Ozone Cleaning for Removal of Surface Contaminants
Rajiv Kohli The Aerospace Corporation, Houston, Texas, USA
Abstract
An overview of the ultraviolet-ozone (UV-O3) method for removal of surface contaminants is provided. UV-O3 is an effective method for removing a variety of contaminants from various surfaces. It is a simple-to-use dry process which is inexpensive to set up and operate. It can produce near-atomically clean surfaces, in air or in a vacuum system, at ambient temperatures. Recent applications of UV-O3 cleaning for removal of surface contaminants are discussed.
Keywords
Ultraviolet (UV)
Ozone
Cleaning
Surface contaminants
Mercury lamp
Xenon excimer lamp
Reference kilogram masses
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