Appendix H
Software Guide
| Chapter 5 and 6 | |
| GPSM_wa | Generalized PSM optimization with discretization penalty and wavelet penalty in coherent imaging system. |
| GPSM_tv | Generalized PSM optimization with discretization penalty and total variation penalty in coherent imaging system. |
| OPC_tv | OPC optimization with discretization penalty and total variation penalty in coherent imaging system. |
| PSM_tv | Two-phase PSM optimization with discretization penalty and total variation penalty in coherent imaging system. |
| Chapter 7 | |
| OPC_acaa | OPC optimization using the average coherent approximation model in partially coherent imaging system. |
| OPC_fse | OPC optimization using the Fourier series expansion model in partially coherent imaging system. |
| PSM_svd | Two-phase PSM optimization using the singular value decomposition model in partially coherent imaging system. |
| SOCS | Calculate the transmission cross-coefficient. |
| Chapter 8 | |
| double_pattern | Double patterning optimization using two generalized PSMs in coherent imaging system. |
| proc_dct | Post-processing based on the two dimensional discrete cosine transform. |
| PSM_dct | Two-phase PSM optimization with the 2D DCT post-processing in partially coherent imaging system. |
| resisttone | Photoresist tone reversing method in partially coherent imaging system. |
| Chapter 9 | |
| smo_OPC | Simultaneous source and binary mask optimization. |
| smo_OPC_mask | Binary mask optimization based on the SMO algorithm without source optimization. |
| smo_PSM | Simultaneous source ... |
