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Chemical Sensors: Simulation and Modeling Volume 3: Solid-State Devices by Ghenadii Korotcenkov

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CHAPTER 9

MODELING OF MICROMACHINED THERMOELECTRIC GAS SENSORS

S. Udina

M. Carmona

C. Calaza

1. PRINCIPLES OF MTGS MODELING

Thermal modeling is of great importance in many sensor applications, particularly for micromachined thermoelectric gas sensors (MTGS), in which a nonthermal signal (the presence of a gas) is converted into a temperature gradient that is subsequently detected by applying the Seebeck effect to convert this temperature difference into an electrical signal voltage. This chapter focuses on how thermal modeling can be used for calculation of the spatial and temporal distributions of temperature in an object, at which a heat load is applied, under certain initial and boundary conditions. The object under consideration is a multilayer ...

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