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Chemical Sensors: Simulation and Modeling Volume 3: Solid-State Devices by Ghenadii Korotcenkov

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CHAPTER 6

MODELING AND SIGNAL PROCESSING STRATEGIES FOR MICROACOUSTIC CHEMICAL SENSORS

G. Fischerauer

F. Thalmayr

1. SENSING PRINCIPLES OF MICROACOUSTIC CHEMICAL SENSORS

1.1. INTRODUCTION

Microacoustic devices are miniaturized physical units based on the interaction of elastic waves with electric fields at kilohertz, megahertz, or gigahertz frequencies. The interaction is effected by plate or interdigital electrodes close to a piezoelectric material and connected with the electrical terminals of the device. As the efficiency of the electroacoustic transduction inside the microacoustic device depends on frequency, the device can be used as a frequency filter. In fact, such filters have been sold by the billions and are omnipresent in TV sets, ...

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