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Chemical Sensors: Simulation and Modeling Volume 3: Solid-State Devices by Ghenadii Korotcenkov

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CHAPTER 5

THE SENSING MECHANISM AND RESPONSE SIMULATION OF THE MIS HYDROGEN SENSOR

Linfeng Zhang

1. INTRODUCTION

Semiconductor gas sensors have been developed for weakly bound gas species at low operating temperature, and these sensors, including Schottky diode and field-effect transistor (FET). Schottky diode sensors, are based mainly on a metal– semiconductor (MS) structure with platinum, palladium, or one of their alloys as a metal gate to detect hydrogen, hydrocarbons, or other gases. The semiconductor substrate may be doped silicon for devices that work at low temperature, or silicon carbide for devices to be operated at high temperature (Schalwig 2002). With an extra metal layer on the other side of the semiconductor substrate, a MS sensor ...

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