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Chemical Sensors: Simulation and Modeling Volume 3: Solid-State Devices by Ghenadii Korotcenkov

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CHAPTER 4

DETECTION MECHANISMS AND PHYSICOCHEMICAL MODELS OF SOLID-STATE HUMIDITY SENSORS

V. K. Khanna

1. INTRODUCTION

Moisture is present in various concentrations in most surroundings. Because of its unique properties, it greatly influences both living organisms and materials (Fitzpatrick 2002; Amin et al. 2004; Prowse 2011). Therefore, humidity measurement and control is vital to many manufacturing processes such as in the textiles, food processing, paper, semiconductor, and petrochemical industries; other critical parameters are temperature and pressure. Humidity sensors find applications in diverse areas such as medical science, packaging, cryogenic processes, environmental monitoring, meteorology, flood-warning systems, and for actuating ...

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